High-pressure standard models from the Ultra-Clean Valve Series. As a standard, these models come with end connections in 1/4". Features include a compact design and a highly reliable seat structure.
Compact models from the Ultra Clean Valve series are made according to UHP specifications
These models come with end connections in the standard 1/4' and are for applications where
a minimum footprint is required.
Flow control models from the Ultra-Clean Valve series are made according to UHP specifications. These models come with
end connections in the standard 1/4" measurement. Each valve is furnished with a handle-lock set screw with a vernier scale.
A Standard model UHP Diaphragm Sealed 2-Valve 3-Port Monoblock for simplifying the
integration of a purge line into a gas system. The Monoblock valve is available with soft
replaceable plug-in seat, made according to UHP specifications.
These models come with a connection joint size of 1/4" as a standard.
Available in a variety of sizes, configurations and port sides with a different flow path for
a wide range of applications.
The Ultra Clean Valves Series offer a surface mount body design. The surface
mount design complies with SEMI PR 3.1 for 1.125'' and 1.5" C-seal. HMS Series
is manufactured according to UHP specifications of SEMI F-20 with manual and
pneumatic operating mechanisms.
